Field
Value
Language
dc.contributor.author
Marchione, Olivia A. C.
datacite.creator.affiliationIdentifier
https://ror.org/01aff2v68
en_US
datacite.creator.affiliation
University of Waterloo
en_US
datacite.creator.nameIdentifier
en_US
dc.date.accessioned
2023-09-19T19:31:00Z
dc.date.available
2023-09-19T19:31:00Z
dc.date.issued
2023-09-19
dc.identifier.uri
https://www.frdr-dfdr.ca/repo/dataset/46b1dbf9-8c7c-43b0-ac7e-7b67a1474f6c
dc.identifier.uri
https://doi.org/10.20383/103.0805
dc.description
A series of over 13,000 measurements taken with an FS-1 ellipsometer, and the parameters of a multi-oscillator model found using Gaussian Regression. Intended for use in material discovery.
en_US
dc.publisher
Federated Research Data Repository / dépôt fédéré de données de recherche
dc.rights
Creative Commons Public Domain Dedication (CC0 1.0)
en_US
dc.rights.uri
https://creativecommons.org/publicdomain/zero/1.0/
en_US
dc.subject
Nanomaterials
en_US
dc.subject
Machine learning
en_US
dc.subject
GPR
en_US
dc.subject
AI
en_US
dc.subject
Artificial intelligence
en_US
dc.subject
Oxides
en_US
dc.subject
Atomic layer deposition
en_US
dc.subject
Thin films
en_US
dc.subject
Semiconductors
en_US
dc.title
Thin Oxide Film Ellipsometry for ML Applications
en_US
globus.shared_endpoint.name
f163c1b3-9c88-42f6-a7bb-5839ed6c4063
globus.shared_endpoint.path
/1/published/publication_800/
datacite.publicationyear
2023
datacite.date.Collected
2021-01-01/2023-09-19
datacite.resourcetype
Dataset
en_US
datacite.geolocation.geolocationPlace
-;Waterloo;Ontario;Canada
datacite.fundingReference.funderIdentifier
https://ror.org/01aff2v68
en_US
datacite.fundingReference.funderName
University of Waterloo
en_US
datacite.fundingReference.awardNumber
en_US
datacite.fundingReference.awardTitle
The University of Waterloo Faculty of Engineering Advanced Manufacturing Doctoral Fellowship
en_US
datacite.fundingReference.funderIdentifier
https://ror.org/01aff2v68
en_US
datacite.fundingReference.funderName
University of Waterloo
en_US
datacite.fundingReference.awardNumber
en_US
datacite.fundingReference.awardTitle
The University of Waterloo Deans Entrance Fellowship
en_US
datacite.fundingReference.funderIdentifier
https://ror.org/01h531d29
en_US
datacite.fundingReference.funderName
Natural Sciences and Engineering Research Council of Canada
en_US
datacite.fundingReference.awardNumber
RGPIN-2017-04212
en_US
datacite.fundingReference.awardTitle
The NSERC Discovery Program
en_US
datacite.fundingReference.funderIdentifier
https://ror.org/01h531d29
en_US
datacite.fundingReference.funderName
Natural Sciences and Engineering Research Council of Canada
en_US
datacite.fundingReference.awardNumber
RGPAS-2017-507977
en_US
datacite.fundingReference.awardTitle
The NSERC Discovery Program
en_US
datacite.fundingReference.funderIdentifier
en_US
datacite.fundingReference.funderName
Canadian Foundation for Innovation
en_US
datacite.fundingReference.awardNumber
Project 35552
en_US
datacite.fundingReference.awardTitle
John R. Evans Leaders Fund
en_US
datacite.fundingReference.funderIdentifier
https://ror.org/000az4664
en_US
datacite.fundingReference.funderName
Canada Foundation for Innovation
en_US
datacite.fundingReference.awardNumber
Project 41017
en_US
datacite.fundingReference.awardTitle
Exceptional Opportunities Fund COVID-19
en_US
datacite.fundingReference.funderIdentifier
en_US
datacite.fundingReference.funderName
Ontario Research Fund
en_US
datacite.fundingReference.awardNumber
Project 35552
en_US
datacite.fundingReference.awardTitle
The Ontario Research Fund - Research Infrastructure
en_US
frdr.crdc.code
RDF2060199
en_US
frdr.crdc.group_en
Materials engineering and resources engineering
en_US
frdr.crdc.class_en
Materials engineering
en_US
frdr.crdc.field_en
Materials engineering, not elsewhere classified
en_US
frdr.crdc.group_fr
Génie des matériaux et génie des ressources
fr_CA
frdr.crdc.class_fr
Génie des matériaux
fr_CA
frdr.crdc.field_fr
Génie des matériaux, non classé ailleurs
fr_CA