Description:	A series of over 13,000 measurements taken with an FS-1 ellipsometer, and the parameters of a multi-oscillator model found using Gaussian Regression. Intended for use in material discovery.
Authors:	Marchione, Olivia A. C.; University of Waterloo
Keywords:	Nanomaterials Machine learning GPR AI Artificial intelligence Oxides Atomic layer deposition Thin films Semiconductors
Field of Research:	Materials engineering and resources engineering > Materials engineering > Materials engineering, not elsewhere classified
Publication Date:	2023-09-19
Publisher:	Federated Research Data Repository / dépôt fédéré de données de recherche
Funder:	University of Waterloo; The University of Waterloo Faculty of Engineering Advanced Manufacturing Doctoral Fellowship University of Waterloo; The University of Waterloo Deans Entrance Fellowship Natural Sciences and Engineering Research Council of Canada; The NSERC Discovery Program; RGPIN-2017-04212 Natural Sciences and Engineering Research Council of Canada; The NSERC Discovery Program; RGPAS-2017-507977 Canadian Foundation for Innovation; John R. Evans Leaders Fund; Project 35552 Canada Foundation for Innovation; Exceptional Opportunities Fund COVID-19; Project 41017 Ontario Research Fund; The Ontario Research Fund - Research Infrastructure; Project 35552
URI:	https://doi.org/10.20383/103.0805
Geographic Coverage:	City Waterloo Province / Province / Territory Ontario Territory   Country Canada