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Thin Oxide Film Ellipsometry for ML Applications
| Description: | A series of over 13,000 measurements taken with an FS-1 ellipsometer, and the parameters of a multi-oscillator model found using Gaussian Regression. Intended for use in material discovery. |
| Authors: | Marchione, Olivia A. C.; University of Waterloo |
| Keywords: | Nanomaterials Machine learning GPR AI Artificial intelligence Oxides Atomic layer deposition Thin films Semiconductors |
| Field of Research: | Materials engineering and resources engineering > Materials engineering > Materials engineering, not elsewhere classified
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| Publication Date: | 2023-09-19 |
| Publisher: | Federated Research Data Repository / dépôt fédéré de données de recherche |
| Funder: | University of Waterloo; The University of Waterloo Faculty of Engineering Advanced Manufacturing Doctoral Fellowship University of Waterloo; The University of Waterloo Deans Entrance Fellowship Natural Sciences and Engineering Research Council of Canada; The NSERC Discovery Program; RGPIN-2017-04212 Natural Sciences and Engineering Research Council of Canada; The NSERC Discovery Program; RGPAS-2017-507977Canada Foundation for Innovation; Exceptional Opportunities Fund COVID-19; Project 41017 |
| URI: | https://doi.org/10.20383/103.0805 |
| Geographic Coverage: | City Waterloo Province / Province / Territory Ontario Territory Country Canada |
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Access to this dataset is subject to the following terms:
Creative Commons Public Domain Dedication (CC0 1.0) https://creativecommons.org/publicdomain/zero/1.0/
Citation
Marchione, O. (2023). Thin Oxide Film Ellipsometry for ML Applications. Federated Research Data Repository. https://doi.org/10.20383/103.0805
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